THIN-FILM PRODUCTS

  • Tungsten sputtering target
Tungsten sputtering target

Tungsten sputtering target

  • Purity: 99.9-99.9995% available
  • ASTM, GB, ISO
  • Rectangular, Wafer, Tube, etc.
  • Customization supported
  • Product description: 99.9-99.9995% Tungsten series sputtering targets used in electronic and semiconductor fields.
  • INQUIRY


Tungsten (W) Series Sputtering Target/Cathode
Item Material Purities Application
W Tungsten 4N5, 5N, 5N5 Electronics, Semiconductor
W Tungsten 3N Glass
WTi (90/10, 80/20) Tungsten/Titanium 4N5, 5N, 5N5
Electronics, Semiconductor
WSi (90/10, 80/20)
Tungsten/Silicon 4N5, 5N, 5N5
Electronics, Semiconductor
Other W Tungsten/Tungsten alloys * Others
  • Purity: 99.9 - 99.9995%
  • Standards: ASTM, GB, GB/T, ISO, YS/T
  • Target Shape: plate, wafer, rectangular, square, circle, tube, step wafer, step rectangle, and customer tailored.
  • Backing plate and supporter: To provide specifications of aluminum target supporter, mammography supporter, copper target supporter, Titanium target supporter.
  • Services
  • Target metallization services
  • Target bonding services.
  • MSDS, RoHS (upon request)

ASTM B760-2007(2013)
Standard Specification for Tungsten Plate, Sheet, and Foil
ASTM B777-2015
Standard Specification for Tungsten Base, High-Density Metal
YS/T 900-2013

Methods for chemical analysis of the high purity tungsten.Determination of trace impurity element content.

Inductively coupled plasma mass spectrometry

YS/T 901-2013

Methods for chemical analysis of high purity tungsten.Determination of trace impurity element content.

Glow discharge mass spectrometry

YS/T 1025-2015
High-purity tungsten and tungsten alloy sputtering target used in electronic film
DS/ISO 2768-1-1993
Tolerances for linear and angular dimensions without individual tolerance indications
DS/ISO 2768-2-1993
Geometrical tolerances for features without individual tolerance indications

Tungsten sputtering target
smelting
Tungsten Sputtering target Forming (Smelting, Powder metallurgy)
Inspection Machining
Inspection Machining
Analysis Microstructure
Analysis Microstructure
Surface Surface
Surface Quality Surface Quality
Sputtering target and Cathode Sputtering target and Cathode
Sputtering target and Cathode Sputtering target and Cathode
Sputtering target and Cathode Sputtering target and Cathode
Sputtering target and Cathode
Sputtering target and Cathode

CONTACT US

Contact: Sales Dept.

Phone: (86) 186 0101 9114 (ER only)

Tel: (86) 10-52868200/01/02/03

Email: sales@sinomaterial.com

Add: 5-301, Lincui West Road, Chaoyang, Beijing China